数据采集#

DataCollection.Show

概述#

数据采集是指在临时或特定处理点采集定量和定性数据的计划。它由一组与数据采集相关的合格参数组成，这些参数指定样品物料的形式（批量、批次、晶圆）、样品数量、每个样品的读数数量、参数是否为必需参数、参数计算（如果有）和限制检查模式。

数据采集将用于创建数据采集实例。数据采集实例可以是：

• 长时间运行 - 根据预定义的数据采集在不同时间点采集数据，通常持续很长一段时间。需要打开和关闭数据采集实例。
• 立即 - 根据预定义的数据采集，一次性采集所有数据。
• 立即临时 - 一次性采集所有数据，无需任何预定义的数据采集。

数据采集可以单独使用，也可以与物料跟踪、资源跟踪和维保管理集成

全局数据和版本控制数据#

数据采集是一个更改受控对象，包含全局数据组件和版本控制数据组件，如下图所示。

graph TD
subgraph Data Collection
Main1["Global Data<br>(Without Change Control)"] --- A1[Data Collection Limits]
Main2["Versioned Data<br>(With Change Control)"] --- A2[All other]
end


classDef mermaid_title color:#000, fill:#fafafa, stroke:#fafafa, stroke-width:0x, font-size:100%, font-weight:200;
classDef mermaid_start color:#000, fill:#fafafa, stroke:#fafafa, color:#fafafa, stroke-width:0x, font-size:100%, visibility: hidden;
classDef mermaid_businessdata color:#000, fill:#65CDE8, stroke:#65CDE8, stroke-width:0px, font-size:100%;
classDef mermaid_nonbusinessdata color:#000, fill:#B7DEE8, stroke:#B7DEE8, stroke-width:0px, font-size:100%;
classDef mermaid_entity color:#000, fill:#FB9F53, stroke:#FB9F53, stroke-width:0px, font-size:100%;
classDef mermaid_entitylinked color:#000, fill:#FCD5B5, stroke:#FCD5B5, stroke-width:0px, font-size:100%;
classDef mermaid_context color:#000, fill:#B9CDE5, stroke:#B9CDE5, stroke-width:0px, font-size:100%;
classDef mermaid_optional color:#000, fill:#B7DEE8, stroke:#65CDE8, stroke-width:1px, font-size:100%, stroke-dasharray: 5 5;
classDef mermaid_state color:#000, fill:#d7e4bd, stroke:#000, stroke-width:1px, font-size:100%, font-weight:300;
class Main1,Main2 mermaid_entity
class A1,A2 mermaid_entitylinked

使用步骤数据采集上下文智能表为给定上下文中的物料解析数据采集。对于特定上下文中的资源，使用资源数据采集上下文智能表解析数据采集。

将一切捆绑在一起#

graph TD
    Main[Data Collection] === L1[Data Collection Limit Set]
    L1 --- A5[Maintenance Activity]
    Main === L2[Data Collection Instance]
    Main === L3[Data Collection Parameter]
    L4[Data Collection Parameter Sample Name] --- Main
    L5[Data Collection Parameter Reading Name] --- Main
    C1[Material Data Collection Context] -.- Main
    C2[Resource Data Collection Context] -.- Main
    L2 --- L6[Data Collection Point]
    L2 --- A1[Resource]
    L2 --- A2[Material]
    L2 --- A3[Other]
    L2 --- A4[Maintenance Activity Order]
    L1 --- L3
    A5 --- Main
    L3 --- A6[Parameter]
    L3 --- A7[Protocol]

classDef mermaid_title color:#000, fill:#fafafa, stroke:#fafafa, stroke-width:0x, font-size:100%, font-weight:200;
classDef mermaid_start color:#000, fill:#fafafa, stroke:#fafafa, color:#fafafa, stroke-width:0x, font-size:100%, visibility: hidden;
classDef mermaid_businessdata color:#000, fill:#65CDE8, stroke:#65CDE8, stroke-width:0px, font-size:100%;
classDef mermaid_nonbusinessdata color:#000, fill:#B7DEE8, stroke:#B7DEE8, stroke-width:0px, font-size:100%;
classDef mermaid_entity color:#000, fill:#FB9F53, stroke:#FB9F53, stroke-width:0px, font-size:100%;
classDef mermaid_entitylinked color:#000, fill:#FCD5B5, stroke:#FCD5B5, stroke-width:0px, font-size:100%;
classDef mermaid_context color:#000, fill:#B9CDE5, stroke:#B9CDE5, stroke-width:0px, font-size:100%;
classDef mermaid_optional color:#000, fill:#B7DEE8, stroke:#65CDE8, stroke-width:1px, font-size:100%, stroke-dasharray: 5 5;
class Main mermaid_entity
class A1,A2,A3,A4,A5,A6,A7,A8,A9,A10,A11,A12 mermaid_businessdata
class L1,L2,L3,L4,L5,L6,L7,L8,L9 mermaid_entitylinked
class C1,C2,C3,C4,C5,C6 mermaid_context
class N1,N2,N3,N4,N5,N6 mermaid_nonbusinessdata

click Main "../../business-data/data-collection"
click L1 "../../business-data/data-collection-limit-set"
click L2 "../../business-data/data-collection/data-collection-instance"
click A1 "../../business-data/resource"
click A2 "../../business-data/material"
click A4 "../../business-data/maintenance-activity-order"
click A6 "../../business-data/parameter"
click A7 "../../business-data/protocol"
click C1 "../../administration/tables/smart-tables/materialdatacollectioncontext"
click C2 "../../administration/tables/smart-tables/resourcedatacollectioncontext"

步骤顺序#

正确使用数据采集的必要步骤如下：

1. 创建数据采集所需的所有参数。
2. 创建数据采集 - 请注意数据采集版本必须与变更集关联。
3. 批准变更集，该变更集包含已创建的数据采集。
4. 选择性地为数据采集创建数据采集限制设定。