Setting Up Automation#
This page describes how to model a Resource on MES to match the expected behavior, necessary configurations and how to connect a Resource to an existing Automation Controller and Driver.
Resource#
The entity Resource should mirror the reality of the tool on the shopfloors, as so it is expected that at least Load Port sub-resources exist on an automated tool. For tools that are capable of doing sub-material tracking at module level the Process sub-resources must also exist.
Additionally the behavior of the Automation Controller and of the Automation Driver is also conditioned by the Resource Properties and Attributes.
The Resource and Sub-Resource State Model are also driven by the Automation Controller and influence the behavior of the solution.
Parent Resource#
Automation Mode settings#
In order for the MES to trigger the actions on the tool:
- The property Automation Mode must be set to Online
- The property Automation Address must contain some information (this is not used for our purposes but is mandatory by product).
Recipe Management#
For tools that support Recipe Management:
- The property Recipe Management Enabled must be true.
Note:
- To be able to retrieve Recipes from the equipment, the Automation Mode must be Online.
Sub-Material Tracking#
To enable Sub-Material Tracking for tools that support it:
- The property Enable Sub Material Tracking must be true.
Note:
- Sub-Material Track State Depth must also be correctly set on the Step (1 to track the material at wafer level).
Resource Connection Attributes#
In this chapter we will focus only the one required to establish communication on a regular tool, additional attributes and configuration will be referred to on case-by-case basis when an Equipment Integration needs them.
To setup a HSMS connection you need to define the following attributes:
- Automation Equipment Address: IP Address or Host Name for the tool HSMS interface.
- Automation Equipment IP Port: IP Port the tool HSMS interface is listening to.
- Automation Equipment Device Id: Device Id the HSMS interface is responding to.
Sub Resources#
Defining the structure of the Resource, by using sub-resources, will impact the possible behaviors of the automation. Currently, Sub-Resources of Processing Type Load Port and Process will imply a defined behavior of the Equipment Integration.
Load Ports#
| Property | Mandatory | Value | Description |
|---|---|---|---|
| Processing Type | Yes | Load Port | Defines Resource as a Load Port |
| Load Port Type | Yes | Input Output/Input/Output | Load Port type defined which Containers will be allowed to execute a Valid Dock on the specific Load Port, based on the Container's content: - Input Output: allows empty Containers and Containers with Material that can be Dispatched to the Parent Resource - Input: allows only Containers with Material that can be Dispatched to the Parent Resource - Output: allows only empty Containers If conditions are not met, Container will be refused by Equipment Integration (Cancel Carrier or equivalent) when executing the Dock on MES. Defined behavior should match the Load Port position and behavior in the physical equipment. |
| Position Unit Type | Yes | Container | Must be defined as Container on MES |
| Track Positions | No | TRUE | Recommended value |
| Auto Generate Positions | No | TRUE | Recommended value |
| Total Positions | No | 1 | Normally Load Ports allow exclusively for 1 Container to be Docked, the value set here should match reality. |
| Container Type | No | If defined, MES will only allow for Container of the defined type to be Docked | |
| Display Order | Yes | Display Order number must match Load Port number on the Equipment Interface | |
| Automation mode | Yes | Online/Offline/None | Load Ports with Automation Mode Online will automatically execute operations on the Container if able to retrieve the needed information (e.g. Dock/Undock). The remaining modes will not impact Container behavior automatically. |
Additionally: the Main State Model for the Load Port Resources must be set to Semi Load Port State Model and the State Model State is recommend be set to Ready To Load on the Resource Model Master Data, when first loading. If there are physical Load Ports that are currently out of service, they must be created with the same State Model but with the State Model State being Out Of Service, which is a Down state.
The Parent Resource needs to have, at least one Load Port child Resources as part of their structure, to allow to Dock Containers.
Process Modules#
To allow to track the Sub-Material through the several Process Modules (i.e., Chambers) of the tool, Process Sub-Resources must be modeled.
| Property | Mandatory | Value | Description |
|---|---|---|---|
| Processing Type | Yes | Process | Defines it as a Process Sub-Resource |
| Position Unit Type | Yes | Material | Must be defined as Material on MES |
| Unlimited Maximum Concurrent Materials in Process | No | TRUE | Recommended value |
| Track Positions | No | FALSE | Recommended value |
Additionally: Automation Module Name attribute should match E90 SubstLocID if the tool supports it. If the tool does not support E90 you can alternatively use Display Order to enforce tracking at that level. Please refer to tool documentation to understand what is supported.
One-Wire vs Multi-Wire Connections#
The above described is directly appliable to One-Wire connections, meaning a singular connection that allows Equipment Integration to Control all Process Resources and Load Ports.
For multi-wire connection, the sub-resource attributes Automation Equipment Address, Automation Equipment IP Port and Automation Equipment Device Id should be used to define the remaing connections and the Automation Drivers should connected to the corresponding sub-resources when creating the connection.
Configurations#
Control and Process Job Id#
The equipment requires the following parameters to determine how to process the materials:
- Process Job ID (PJ): Indicates to the equipment which processing instructions to apply (e.g., recipes and parameters).
- Control Job ID (CJ): Indicates to the equipment which Process Jobs should be executed and in what order; a single CJ may contain one or more PJs. These IDs must be unique for the equipment.
In MES, these IDs are created by name generators stored in the SemiAutomationJobIdLogic table. To add new name generators, populate the lookup tables SemiProcessJobIdNameGenerators and SemiControlJobIdNameGenerators.