SemiErrorCode#
Lookup table with the error code.
Values:
| Name | Description |
|---|---|
| MaterialArrivedError | |
| CarrierIdFailedToRead | |
| CarrierFailedToClamp | |
| InvalidCarrierDocked | |
| CarrierFailedToOpen | |
| CassetteSlotMapFailed | |
| CassetteFailedToLoad | |
| TrackInValidationFailed | |
| RecipeValidationFailed | |
| FailingTrackIn | |
| TrackInFailed | |
| PPSelectFailed | |
| StartCommandFailed | |
| ProcessError | |
| FatalProcessError | |
| WaferProcessError | |
| FatalWaferProcessError | |
| CarrierFailedToClose | |
| CassetteFailedToUnload | |
| CarrierFailedToUnclamp | |
| FailedOnReadyToUnload | |
| MaterialRemovedError | |
| OtherError | |
| NotifyErrorOnly | |
| FatalProcessAlarmAffectsMaterial | |
| FatalProcessAlarm | |
| AlarmSetDetected | |
| AlarmClearDetected | |
| AlarmDetectedRequiresFutureHold | |
| EquipmentCommunication | |
| Unknown |