Configuring Alarm Management Behavior#

Equipment Integration is designed to be able to trigger a set of behaviors when an Alarm occurs.

How it works#

The configuration is done by configuring the Smart Table SemiAlarmManagement.

Notifications are triggered based on the context defined on the Smart Table columns:

• Alarm Id:
  • Id of the Alarm on the Tool, corresponds to ALID on SECS/GEM communication.
• Alarm State:
  • State of the Alarm, if the Alarm is being Set or Cleared:
    • Alarm Set True corresponds to Alarm Set
    • Alarm Set False corresponds to Alarm Cleared
• AutomationController:
  • Automation Controller connected to the Automation Controller Instance that has triggered the Alarm.
    • This setting can be use to set a particular behavior for all Equipment running the same Automation Controller
• Resource:
  • Resource connected to the Automation Controller Instance.

If no line matches the context no action will be triggered.

Behavior is defined by filling the following values:

• ErrorType:
  • Type of the Error, defines Error Handling Action to be taken.
  • Error handling behavior can be set by following this document.
• Store Data Collection:
  • If enabled, an Immediate Data Collection Instance will be posted to the Resource containing the information of the Alarm.
• Include Materials In Process:
  • If enabled, Materials currently In Process on the Resource will be set as context for the Error Handling actions, allowing for actions to be taken on them.
• Automation Module Name:
  • Automation Module Name Attribute value for the Sub-Resource affected by the Alarm, if known, this will be added to the Error Handling context.
• Context:
  • Addtional Context for Error Handling actions, this field expected a valid JSON Object.

Notes and Requirements#

Example of configuring a Notification#

Below you can find an example on how to setup a Notification: