Skip to content

E116 Process State Model

E116 Process State Model#

E116 or, Equipment Performance Tracking, is a standard that defines the tracking of the behavior of the tool or or a component of a tool.

E116 State Model

On the MES this is mapped on the state model SemiEquipmentProcessTrackingStateModel:

EquipmentProcessTrackingStateModel

To track the tool Process State by using E116 you should use the workflow ResourceEPTState_01_EptStateChangeReceived.

Note

This state model will drive the SEMI-E10 or SEMI-E10 equivalent Main State Model for the Parent Resource. The mapping is as following:

  • E116 Idle -> SEMI E10 Standby
  • E116 Busy -> SEMI E10 Productive
  • E116 Blocked -> SEMI E10 Unscheduled Down