Naming and Report Conventions#
Why follow conventions?#
Following naming conventions will allow you to maximize the use of templated functionalities, letting you go as far as letting you easily cover the testing of the functionalities on our internal testing framework and classes.
Report Id Guidelines#
The guidelines stated on this chapter have only the intent to help keep coherence between all the projects that are developed using this template.
In this case the intent is to help maintenance and debug from a developer's/maintenance engineer's perspective.
| Report Topic | Report Id Rang | Range Reseverd | Range For Custom Reports |
|---|---|---|---|
| Load Port Related | 100 to 199 | 100 to 110 | 111 to 199 |
| Carrier Related | 200 to 299 | 200 to 210 | 211 to 299 |
| Control Job Related | 300 to 399 | 300 to 310 | 311 to 399 |
| Process Job Related | 400 to 499 | 400 to 410 | 411 to 499 |
| Substrate Related | 500 to 599 | 500 to 510 | 511 to 599 |
| Generic Data Collection Related | 600 to 699 | N/A | 600 to 699 |
| Equipment States Related | 700 to 799 | 700 to 710 | 711 to 799 |
| Custom Reports | 800 upwards | N/A | 800 upwards |
Carrier Management (CMS) - E87#
Load Port Transfer#
Events#
| State Model Transition | Template Event Name | Template Description | Comment |
|---|---|---|---|
| E87 LPT 1 | E87:LoadPortTransfer:001:NoState-LoadPortTransfer | (no state) to Out of Service or In Service (history) | |
| E87 LPT 2 | E87:LoadPortTransfer:002:OutOfService-InService | Out of Service to In Service | |
| E87 LPT 3 | E87:LoadPortTransfer:003:InService-OutOfService | In Service to Out of Service | |
| E87 LPT 4 | E87:LoadPortTransfer:004:InService | In Service to Transfer Ready or Transfer Blocked | |
| E87 LPT 5 | E87:LoadPortTransfer:005:TransferReady | Transfer Ready to Ready to Load or Ready to Unload | Carrier Id is available for this event |
| E87 LPT 6 | E87:LoadPortTransfer:006:ReadyToLoad-TransferBlocked | Ready to Load to Transfer Blocked | |
| E87 LPT 7 | E87:LoadPortTransfer:007:ReadyToUnload-TransferBlocked | Ready to Unload to Transfer Blocked | |
| E87 LPT 8 | E87:LoadPortTransfer:008:TransferBlocked-ReadyToLoad | Transfer Blocked to Ready to Load | |
| E87 LPT 9 | E87:LoadPortTransfer:009:TransferBlocked-ReadyToUnload | Transfer Blocked to Ready to Unload | Carrier Id is available for this event |
| E87 LPT 10 | E87:LoadPortTransfer:010:TransferBlocked-TransferReady | Transfer Blocked to Transfer Ready |
Report Content#
Report 101#
This report is valid for the following events:
- E87 LPT 1
- E87 LPT 2
- E87 LPT 3
- E87 LPT 4
- E87 LPT 6
- E87 LPT 7
- E87 LPT 8
- E87 LPT 10
The report as the following structure:
| Variable Name | Template Variable Description | Comment |
|---|---|---|
| E87:PortId | ||
| E87:PortTransferState |
Report 102#
This report is valid for the following events:
- E87 LPT 5
- E87 LPT 9
The report as the following structure:
| Variable Name | Template Variable Description | Comment |
|---|---|---|
| E87:PortId | ||
| E87:PortTransferState | ||
| E87:CarrierId |
Carrier#
Events#
| State Model Transition | Template Event Name | Template Description | Comment |
|---|---|---|---|
| E87 CSM 1 | E87:Carrier:001:NoState-Carrier | (no state) to Carrier | A carrier is instantiated |
| E87 CSM 2 | E87:Carrier:002:NoState-IdNotRead | (no state) to Id Not Read | Normal: A Bind or Carrier Notification service is received |
| E87 CSM 3 | E87:Carrier:003:NoState-WaitingForHost | (no state) to Waiting for Host | Normal: A carrierID not currently existing at the equipment is successfully read. Abnormal: A carrierID is read successfully but an equipment based verification failed. |
| E87 CSM 4 | E87:Carrier:004:NoState-IdVerificationOK | (no state) to Id Verification Ok | A carrier is instantiated having the carrierID provided by the Proceed With Carrier service |
| E87 CSM 5 | E87:Carrier:005:NoState-IdVerificationFailed | (no state) to Id Verification Fail | A carrier is instantiated having the carrierID provided by the Cancel Carrier service. |
| E87 CSM 6 | E87:Carrier:006:IdNotRead-IdVerificationOK | Id Not Read to Id Verification Ok | Carrier ID is read successfully and the equipment has verified the carrierID successfully |
| E87 CSM 7 | E87:Carrier:007:IdNotRead-WaitingForHost | Id Not Read to Waiting for Host | Carrier ID is read unsuccessfully or is waiting verification |
| E87 CSM 8 | E87:Carrier:008:WaitingForHost-IdVerificationOK | Waiting for Host to Id Verification Ok | A ProceedWithCarrier service is received |
| E87 CSM 9 | E87:Carrier:009:WaitingForHost-IdVerificationFailed | Waiting for Host to Id Verification Failed | A Cancel Carrier Service is received. |
| E87 CSM 10 | E87:Carrier:010:IdNotRead-WaitingForHost | Id Not Read to Waiting for Host | BypassReadID variable is set to FALSE, and a carrier is received when the id reader is not in service or not installed. |
| E87 CSM 11 | E87:Carrier:011:IdNotRead-IdVerificationOK | Id Not Read to Id Verification Ok | BypassReadID variable is set to TRUE, and a carrier is received when the id reader is not in service or not installed. |
| E87 CSM 12 | E87:Carrier:012:NoState-SlotMapNotRead | (no state) to Slot Map Not Read | A carrier is instantiated |
| E87 CSM 13 | E87:Carrier:013:SlotMapNotRead-SlotMapVerificationOK | Slot Map Not Read to Slot Map Verification Ok | Slot Map is read and verified successfully by the equipment |
| E87 CSM 14 | E87:Carrier:014:SlotMapNotRead-WaitingForHost | Slot Map Not Read to Waiting for Host | Normal host based verification: Slot Map is read successfully and the equipment is waiting for host verification. Equipment based verification fail: Slot Map is read successfully but equipment based verification has failed. Slot map read fail: Slot Map cannot be read. Abnormal Substrate position within the carrier: The Slot Map read has indicated an abnormal Substrate position. |
| E87 CSM 15 | E87:Carrier:015:WaitingForHost-SlotMapVerificationOK | Waiting for Host to Slot Map Verification Ok | A ProceedWithCarrier service is received. |
| E87 CSM 16 | E87:Carrier:016:WaitingForHost-SlotMapVerificationFailed | Waiting for Host to Slot Map Verification Fail | A CancelCarrier service is received. |
| E87 CSM 17 | E87:Carrier:017:NoState-NotAccessed | (no state) to Not Accessed | A carrier object is instantiated. |
| E87 CSM 18 | E87:Carrier:018:NoState-InAccess | Not Accessed to In Access | The equipment starts accessing the carrier. |
| E87 CSM 19 | E87:Carrier:019:InAccess-CarrierComplete | In Access to Carrier Complete | The equipment finishes accessing the carrier normally |
| E87 CSM 20 | E87:Carrier:020:InAccess-CarrierStopped | In Access to Carrier Stopped | The equipment finishes accessing the carrier abnormally |
| E87 CSM 21 | E87:Carrier:021:Carrier-NoState | Carrier to (no state) | Normal: The carrier is unloaded from the equipment. Abnormal by service: CancelBind or CancelCarrierNotification service is received prior to the carrier load. Abnormal by equipment: An equipment based verification fails and the equipment performs a self-initiated CancelBind service. |
Report Content#
Report 201#
This report is valid for the following events:
- E87 CSM 2
- E87 CSM 4
- E87 CSM 5
The report as the following structure
| Variable Name | Template Variable Description | Comment |
|---|---|---|
| Custom:CarrierIDStatus | ||
| E87:CarrierId |
Report 202#
This report is valid for the following events:
- E87 CSM 3
- E87 CSM 6
- E87 CSM 7
- E87 CSM 8
- E87 CSM 9
- E87 CSM 10
- E87 CSM 11
The report as the following structure
| Variable Name | Template Variable Description | Comment |
|---|---|---|
| Custom:CarrierIDStatus | ||
| E87:CarrierId | ||
| E87:PortId |
Report 203#
This report is valid for the following events:
- E87 CSM 13
- E87 CSM 16
The report as the following structure
| Variable Name | Template Variable Description | Comment |
|---|---|---|
| E87:CarrierId | ||
| E87:PortId | ||
| Custom:LocationID | ||
| Custom:CarrierAccessingStatus | ||
| Custom:SlotMapStatus |
Report 204#
This report is valid for the following events:
- E87 CSM 14
The report as the following structure
| Variable Name | Template Variable Description | Comment |
|---|---|---|
| E87:CarrierId | ||
| E87:PortId | ||
| Custom:LocationID | ||
| E87:Carrier:SlotMap | ||
| Custom:Reason | ||
| Custom:SlotMapStatus |
Report 205#
This report is valid for the following events:
- E87 CSM 15
The report as the following structure
| Variable Name | Template Variable Description | Comment |
|---|---|---|
| E87:CarrierId | ||
| E87:PortId | ||
| Custom:LocationID | ||
| Custom:SlotMapStatus |
Report 206#
This report is valid for the following events:
- E87 CSM 18
- E87 CSM 19
- E87 CSM 20
The report as the following structure
| Variable Name | Template Variable Description | Comment |
|---|---|---|
| E87:CarrierId | ||
| Custom:CarrierAccessingStatus |
Control Job Management - E94#
Events#
| State Model Transition | Template Event Name | Template Description | Comment |
|---|---|---|---|
| E94 CJ 1 | E94:ControlJob:001:NoState-Queued | (no state) to Queued | Receive “Create” command from host or operator through operator console. |
| E94 CJ 2 | E94:ControlJob:002:Queued-NoState | Queued to (no state) | Receive “Cancel”, “Abort”, or “Stop” command from host or operator through operator console |
| E94 CJ 3 | E94:ControlJob:003:Queued-Selected | Queued to Selected | The processing resource has capacity to begin work on the next ControlJob. |
| E94 CJ 4 | E94:ControlJob:004:Selected-Queued | Selected to Queued | Receive “De-select” command from host or operator through operator console and materials for the control job have not arrived yet. |
| E94 CJ 5 | E94:ControlJob:005:Selected-Queued | Selected to Executing | Material for the first process job arrives or in the case where the first (or only) process job does not require material, this transition shall be taken as soon as the processing resource for that process job becomes available. “StartMethod” attribute in the ControlJob is set for Auto |
| E94 CJ 6 | E94:ControlJob:006:Selected-WaitingForStart | Selected to Waiting for Start | Same as for transition 5 except that the “StartMethod” attribute in the control job is set for user start. |
| E94 CJ 7 | E94:ControlJob:007:WaitingForStart-Executing | Waiting for Start to Executing | User START command received |
| E94 CJ 8 | E94:ControlJob:008:Executing-Paused | Executing to Paused | Received “Pause” message from host or operator through operator console or a ControlJob. PauseEvent has occurred. |
| E94 CJ 9 | E94:ControlJob:009:Paused-Executing | Paused to Executing | Receive “Resume” message from host or operator through operator console. |
| E94 CJ 10 | E94:ControlJob:010:Executing-Completed | Executing to Completed | All the ProcessJobs specified for the ControlJob have completed |
| E94 CJ 11 | E94:ControlJob:011:Active-Completed | Active to Completed | Receive “CJStop” message from host or operator through operator console or all the process jobs under the ControlJob have been stopped and material processing is stopped. |
| E94 CJ 12 | E94:ControlJob:012:Active-Completed | Active to Completed | Receive “CJAbort” command from host or operator through operator console or all the process jobs under the ControlJob have been aborted and material processing is aborted. |
| E94 CJ 13 | E94:ControlJob:013:Completed-NoState | Completed to (no state) | The ControlJob is deleted |
Reports#
Report 301#
This report is valid for the following events:
- E94 CJ 1
- E94 CJ 2
- E94 CJ 3
- E94 CJ 4
- E94 CJ 5
- E94 CJ 6
- E94 CJ 7
- E94 CJ 8
- E94 CJ 9
- E94 CJ 10
- E94 CJ 11
- E94 CJ 12
- E94 CJ 13
The report as the following structure
| Variable Name | Template Variable Description | Comment |
|---|---|---|
| E94:ControlJob:ObjId | ||
| E94:ControlJob:State |
Processing Management - E40#
Events#
| State Model Transition | Template Event Name | Template Description | Comment |
|---|---|---|---|
| E40 PJ 1 | E40:ProcessJob:001:NoState-QueuedPooled | (no state) to Queued/Pooled | The processing resource accepts a Process Job create request. |
| E40 PJ 2 | E40:ProcessJob:002:QueuedPooled-SettingUp | Queued/Pooled to Setting Up | The processing resource has been allocated to the Process Job. |
| E40 PJ 3 | E40:ProcessJob:003:SettingUp-WaitingForStart | Setting Up to Waiting for Start | Job material is present AND the processing resource is ready to start the process job AND PRProcessStart attribute is not set |
| E40 PJ 4 | E40:ProcessJob:004:SettingUp-Processing | Setting Up to Processing | Material is present and ready for processing. PRProcessStart attribute is set |
| E40 PJ 5 | E40:ProcessJob:005:WaitingForStart-Processing | Waiting for Start to Processing | Job Start directive |
| E40 PJ 6 | E40:ProcessJob:006:Processing-ProcessingComplete | Processing to Process Complete | Material processing completed |
| E40 PJ 7 | E40:ProcessJob:007:PostActive-NoState | Process Complete to (no state) | Job material departed the processing resource AND resource post-conditioning completed, OR superceded by another process job on the same material |
| E40 PJ 8 | E40:ProcessJob:008:Executing-Pausing | Executing to Pausing | The processing resource initiated a process pause action. (it received a PAUSE command or initiated an internal pause) |
| E40 PJ 9 | E40:ProcessJob:009:Pausing-Paused | Pausing to Paused | The processing resource paused the job. |
| E40 PJ 10 | E40:ProcessJob:010:Paused-Executing | Paused to Executing | The processing resource resumed the job. |
| E40 PJ 11 | E40:ProcessJob:011:Executing-Stopping | Executing to Stopping | The processing resource initiated a process stop action. (it received a STOP command or initiated an internal stop) |
| E40 PJ 12 | E40:ProcessJob:012:Pause-Stopping | Pause to Stopping | The processing resource initiated a process stop action. (it received a STOP command or initiated an internal stop) |
| E40 PJ 13 | E40:ProcessJob:013:Executing-Aborting | Executing to Aborting | The processing resource initiated a process abort action. (it received an ABORT command or initiated an internal abort) |
| E40 PJ 14 | E40:ProcessJob:014:Stopping-Aborting | Stopping to Aborting | The processing resource initiated a process abort action. (it received an ABORT command or initiated an internal abort) |
| E40 PJ 15 | E40:ProcessJob:015:Pause-Aborting | Pause to Aborting | The processing resource initiated a process abort action. (it received an ABORT command or initiated an internal abort) |
| E40 PJ 16 | E40:ProcessJob:016:Aborting-Aborted | Aborting to (no state) | The processing resource abort procedure is complete and for some processing equipment the related Substrates are moved out as part of the error recovery. |
| E40 PJ 17 | E40:ProcessJob:017:Stopping-Stopped | Stopping to (no state) | The processing resources stop procedure completed. |
| E40 PJ 18 | E40:ProcessJob:018:QueuedPooled-NoState | Queued/Pooled to (no state) | “CANCEL,” “ABORT,” or “STOP” command received. |
Reports#
Report 401#
This report is valid for the following events:
- E40 PJ 1
- E40 PJ 2
- E40 PJ 3
- E40 PJ 4
- E40 PJ 5
- E40 PJ 6
- E40 PJ 7
- E40 PJ 8
- E40 PJ 9
- E40 PJ 10
- E40 PJ 11
- E40 PJ 12
- E40 PJ 13
- E40 PJ 14
- E40 PJ 15
- E40 PJ 16
- E40 PJ 17
- E40 PJ 18
The report as the following structure:
| Variable Name | Template Variable Description | Comment |
|---|---|---|
| E40:ProcessJob:ObjId | ||
| E40:ProcessJobPRJobState |
Substrate Tracking - E90#
Events#
| State Model Transition | Template Event Name | Template Description | Comment | | ---------------------- | ------------------------------------------- | --------------------------------------- | ------------------------------------------------------------------------------------------------------------------------------------------------------------ | --- | | E90 SO 1 | E90:Substrate:001:NoState-AtSource | (no state) to At Source | The Substrate is registered | | E90 SO 2 | E90:Substrate:002:AtSource-AtWork | At Source to At Work | The Substrate is taken from the source Substrate location and placed into the equipment. | | E90 SO 3 | E90:Substrate:003:AtWork-AtSource | At Work to At Source | The Substrate has moved to the source Substrate location. | | E90 SO 4 | E90:Substrate:004:AtWork-AtWork | At Work to At Work | The Substrate has moved out
from current equipment Substrate location towards a new equipment Substrate location | | E90 SO 5 | E90:Substrate:005:AtWork-AtDestination | At Work to At Destination | The Substrate is moved to the destination Substrate location | | E90 SO 6 | E90:Substrate:006:AtDestination-AtWork | At Destination to At Work | The Substrate is taken from the destination Substrate location and placed into the equipment. | | E90 SO 7 | E90:Substrate:007:NoState | At Destination to (Extinction) | The Substrate is removed from the equipment by a normal transfer sequence | | E90 SO 8 | E90:Substrate:008:AtDestination-AtSource | At Destination to At Source | The user informs or the equipment detects that the Substrate is AT SOURCE | | E90 SO 9 | E90:Substrate:009:NoState | Any Substrate Substate to (Extinction) | The equipment detects or is informed by the user that a Substrate has been removed. | | E90 SO 10 | E90:Substrate:010:NoState-NeedsProcessing | (no state) to Needs Processing | The Substrate object is created. | | E90 SO 11 | E90:Substrate:011:NeedsProcessing-InProcess | Needs Processing to In Process | The processing to the Substrate starts. | | E90 SO 12 | E90:Substrate:012:ProcessingComplete | In Process to Processing Complete | The processing to the Substrate completes. | | E90 SO 13 | E90:Substrate:013:InProcess-NeedsProcessing | In Process to Needs Processing | The Substrate is requested to be processed again. | | E90 SO 14 | E90:Substrate:014:ProcessingComplete | Needs Processing to Processing Complete | The Substrate has been removed from the equipment by an external agent or it is physically missing (LOST) or the Substrate has been not processed (SKIPPED). | |
Reports#
Report 501#
This report is valid for the following events:
- E90 SO 1
- E90 SO 2
- E90 SO 3
- E90 SO 4
- E90 SO 5
- E90 SO 6
- E90 SO 7
- E90 SO 8
- E90 SO 9
- E90 SO 10
- E90 SO 11
- E90 SO 12
- E90 SO 13
- E90 SO 14
The report as the following structure:
| Variable Name | Template Variable Description | Comment |
|---|---|---|
| E90:Substrate:LotID | ||
| Custom:SubstrateMaterialStatus | ||
| E90:Substrate:ObjID | ||
| E90:Substrate:SubstDestination | ||
| Custom:SubstrateHistory | ||
| E90:Substrate:SubstLocID | ||
| E90:Substrate:SubstProcState | ||
| E90:Substrate:SubstSource | ||
| E90:Substrate:SubstState | ||
| E90:Substrate:SubstType | ||
| E90:Substrate:SubstUsage |