--- alias: tutorials-equipment-qualification-execution description: "Tutorial explaining how to execute an Equipment Qualification Check when the type restriction mode is require none or require specific." glightbox: false --- # Performing a Qualification Check ## Requesting Maintenance Activities After [[tutorials-equipment-qualification-configuration#step-2-associate-qualification-items|associating the Qualification Items]], we can open the **Maintenance** view of the `DICING_SAW_01` **Resource** to request the ad hoc Maintenance Activities. This can be done in two ways: * Dragging and dropping each Maintenance Activity into the calendar view. * Using the **Request** button from the top ribbon to request both activities at the same time. === "Drag and Drop" ![Screenshot showing how to drag and drop maintenance activities](images/drag_drop_maintenance_activities.png) === "Request Button" ![Screenshot showing request maintenance activities](images/request_maintenance_activities.png) In both cases, we must specify the Executed by role. This role must match the Owner Role defined in [[tutorials-equipment-qualification-configuration#step-4-create-a-maintenance-plan-instance|step 4]] (in this scenario, `Quality Control`). !!! info "Qualification Checks Without Items" When a MAO is requested for a Qualification activity that includes Qualification Checks with no associated Qualification Item, those checks are created in the `Obsolete` state and do not require result capture. We can also enable the options to **Approve Maintenance Activity Orders** and **Release Maintenance Activity Orders** to skip those manual steps. After selecting **Request**, two **MAOs** are opened: * One **MAO** for the Maintenance Activity where the Type Restriction Mode is set to `Require None`. * One **MAO** for the Maintenance Activity where the Type Restriction Mode is set to `Require Specific`. As previously mentioned, the Qualification Check workflow differs depending on the Type Restriction Mode selected. The sections below describe how each scenario is handled. ## Type Restriction Mode: Require None A Maintenance Activity with the Type Restriction Mode set to `Require None` is the simplest way to perform a **Qualification Check**. After requesting the **MAO**, and if the **Approve** and **Release** options were enabled during the request, the **MAO** will already be ready for execution. Navigating to the **Qualifications** section shows that the `Litho_PM_Qualification` Qualification Check is `In Progress`. Switching to the **Qualification Items** tab, shows the two Qualification Items configured earlier. === "Qualification Checks" ![Screenshot showing the qualification checks of the MAO](images/qualification_checks_require_none.png) === "Qualification Items" ![Screenshot showing the qualification items of the MAO](images/qualification_items_require_none.png) To perform the **Qualification Check**, first ensure that all tasks associated with the **Maintenance Plan** (such as Checklists or Data Collections) have been completed. Then, select the **Complete** button from the top ribbon. Since the **Resource** is configured with a State Model, a new state can be selected. By default, the state is `Standby`, although it can be overridden if required. ![Screenshot showing how to complete a maintenance activity order](images/complete_maintenance_activity_order.png) Next, we must classify the Results of the **Qualification Check**. Two outcomes are possible: **Pass** or **Fail**. ### Result: Pass If the **Resource** successfully passes the **Qualification Check**, select `Pass` and choose **Complete**. ![Screenshot showing how to complete a maintenance activity order - adding qualification results](images/complete_maintenance_activity_order_qualification_results_pass.png) This will terminate the **MAO** and change the state of the **Qualification Check** to `Complete`. The details of the **Qualification Check** and Qualification Items can be reviewed in the **Qualification** section of the **MAO**. === "Qualification Checks" ![Screenshot showing the qualification checks of the MAO when the results are set to Pass](images/qualification_checks_pass_result.png) === "Qualification Items" ![Screenshot showing the qualification items of the MAO when the results are set to Pass](images/qualification_items_pass_result.png) ### Result: Fail If the `DICING_SAW_01` Resource does not meet the qualification criteria, set the Result to `Fail`. ![Screenshot showing how to complete a maintenance activity order - adding qualification results](images/complete_maintenance_activity_order_qualification_results_fail.png) Whenever a Result is set to **Fail**, the system automatically creates a rework of the **MAO**, as shown below. ![Screenshot showing how that after completing a maintenance activity order with failed results, the system creates a copy of the MAO](images/complete_maintenance_activity_order_qualification_results_rework.png) In this case, the **MAO** will also be terminated but the **Qualification Check** will remain as `In Progress`. The details of the **Qualification Check** and Qualification Items can be reviewed in the **Qualification** section of the **MAO**. === "Qualification Checks" ![Screenshot showing the qualification checks of the MAO when the results are set to fail](images/qualification_checks_fail_result.png) === "Qualification Items" ![Screenshot showing the qualification items of the MAO when the results are set to fail](images/qualification_items_fail_result.png) To complete the **Qualification Check**, simply navigate to the newly created **MAO** and repeat the process. ## Type Restriction Mode: Require Specific When a **Qualification Check** workflow requires processing **Materials** and **Verification Steps**, the Type Restriction Mode should be set to `Require Specific`. This mode enables more advanced qualification scenarios, where **Materials** are processed through a **Flow** and **Verification** Results are captured at specific **Steps**. !!! info "Run at Risk Behavior" Qualification Materials can still be processed on Resources that are pending or failing a Qualification Check, depending on the configured run at risk settings. For more information, see [[user-guide-manage-run-at-risk-materials]], [[user-guide-dispatch-at-risk]], and [[user-guide-track-in-at-risk]]. !!! tip "Pending Qualification Restrictions" In this scenario, Qualification Materials are an exception to the normal dispatch restrictions related to Service pending qualifications, so they can still be dispatched for the Qualification flow. For Sub-Material tracking, if the target Resource has pending qualifications, the Top-Most Material must either be Run At Risk or be a Qualification Material. !!! info "Qualification Materials in Bulk Operations" Qualification Materials cannot be processed together with Non-Qualification Materials in the same bulk Dispatch, Track-In, or Track-Out operation. Qualification Materials are identified by having the Qualification Count higher than `0`. As in the previous scenario, the **Qualification Checks** and Qualification Items can be viewed from the **Qualifications** section of the **MAO**. However, in this case an additional **Verifications** view is available. The **Verifications** table summarizes how the Results will be captured and at which **Step** the **Verification** will occur. === "Qualification Checks" ![Screenshot showing the qualification checks of the MAO when the restriction type is set to require specific](images/qualification_checks_require_specific.png) === "Qualification Checks: Verifications" ![Screenshot showing the verifications of the MAO when the restriction type is set to require specific](images/qualification_checks_verifications_require_specific.png) === "Qualification Items" ![Screenshot showing the qualification items of the MAO when the restriction type is set to require specific](images/qualification_items_require_specific.png) ### Manage Qualification Materials Before capturing the Results, we must assign a **Qualification Material** to the **MAO**. To do this: 1. Navigate to the **Materials** section of the **MAO**. 2. Select **Manage Materials**. 3. In this scenario, add the `Litho_Monitor_Wafer_001` Material. ![Screenshot showing how to manage qualification materials](images/manage_qualification_materials.png) Once the **Material** is assigned to the **MAO**, the **Qualification Check** workflow can begin. ### Capturing Verification Results According to the scenario defined in [[tutorials-equipment-qualification-configuration#scenario]], the `Litho_Monitor_Wafer_001` Material must be processed through the `Litho_Qualification` Flow. Opening the `Litho_Monitor_Wafer_001` Material page shows that the material is initially located at the Assignment Step ( `WAFER UNLOAD`). From here: 1. **Dispatch** and **Track-In** the Material. 2. **Track-Out** and **Move-Next** to the **Execution Step** (`WAFER SAW`), where the **Qualification Check** will be performed. Alternatively, we can perform the same operations from the `WAFER UNLOAD` Step view. In this view, the Qualification Materials are identified by a :mes-entitytypes-qualificationcheck-lg: icon. When a **Qualification Material** is dispatched and tracked-in in the **Execution Step**, the **Qualification Check** state changes from `Started` to `In Progress` only if it is still in state `Started`. If the **Qualification Check** is already `In Progress` or `In Verification`, additional **Qualification Materials** can still be dispatched and tracked in through the **Execution Step**, and the **Qualification Check** state is not updated. !!! note "Qualification Item Assignment" When an MAO contains multiple Qualification Items that share the same execution point, the Material must be assigned to each matching Qualification Check. This includes scenarios where one Qualification Item is a Recipe and another is a Resource, as long as they have the same execution point. !!! info "Running Modes During Qualification" If Running Modes are enabled for the Resource, the list includes all Running Modes, including the ones that are disabled because of Qualifications. When both enabled and disabled Running Modes are displayed, each one is identified as `Available` or `Not Available`. Running Mode selection does not restrict Sub-Resource Qualification Item matching during Track-In. When the system evaluates Sub-Resources for Equipment Qualification, it considers all direct Sub-Resources of the Track-In Resource and is not limited to the Running Mode's Required Sub-Resources. The video at the end of [[tutorials-equipment-qualification-execution#verification-3-spc-with-no-violation-and-dc-within-limits| Verification 3]] demonstrates how a **Qualification Material** is processed through the **Flow** and reaches the **Execution Step**, where the **Qualification Check** may either change state or continue without a state update, depending on its current state. The following sections demonstrate how each **Verification** mode works. #### Verification 1: Manual After the Material is processed through the `WAFER SAW` Step, it reaches the **first Verification Step**: `WAFER THIN INSPECT`. This **Verification** uses the `Manual` Results Capture Mode. To record the Results: 1. Return to the **MAO**. 2. Select the corresponding **Verification**. 3. Select **Record Results**. 4. In the wizard, manually select either **Pass** or **Fail**. 5. For this tutorial, select `Pass`, then choose **Record**. After recording the Result, the Verification status is updated in the **Qualification** section of the **MAO**. !!! info "Video Tutorial" The video at the end of [[tutorials-equipment-qualification-execution#verification-3-spc-with-no-violation-and-dc-within-limits| Verification 3]] demonstrates how the Verification Result is recorded manually. #### Verification 2: Manual At Track-Out The **second Verification** occurs at the `POST DICING INSPECT` Step. This **Verification** uses the `Manual At Track-Out` Results Capture Mode. To perform this Verification: 1. **Dispatch** and **Track-In** the Material. 2. Perform **Track-Out** and **Move-Next**. 3. During the **Track-Out** operation, the wizard prompts us to set the **Verification** result. !!! info "Track-Out Result Capture" During Equipment Qualification, the Track-Out operation captures Qualification Check Verification Results for matching Qualification Checks in state `In Verification`, or in `In Progress` when the Qualification Execution Point matches the Qualification Check Verification Point. The Material Flow Point must match a Qualification Check Verification Point whose Result is `Null` or `Fail`. For demonstration purposes: 1. First select `Fail`. 2. When the Verification is prompted again during Track-Out, record the Result directly as `Pass`. No separate Clear Results step is required. The updated result can then be viewed in the **Verification** section of the **MAO**. !!! info "Video Tutorial" The video at the end of [[tutorials-equipment-qualification-execution#verification-3-spc-with-no-violation-and-dc-within-limits| Verification 3]] demonstrates how the Verification Result is recorded manually at Track-Out. #### Verification 3: SPC With No Violation And DC Within Limits The **final Verification** occurs at the `DICING KERF INSPECT` Step. This **Verification** uses the `SPC With No Violation And DC Within Limits` Results Capture Mode. Since this **Verification** was configured as `Skippable`, two options are available: * Skip the **Verification**. * Perform the **Verification** by processing the **Material**. To perform the verification: 1. **Dispatch** and **Track-In** the Material. 2. Perform **Track-Out** and **Move-Next**. 3. Post the required **Data Collection**. 4. Once the operation is completed, the **SPC Chart** is shown. If no SPC violations are detected and the Data Collection values are within limits, the **Verification** automatically passes. The video below demonstrates the full **Qualification Check** execution workflow, including how the **Material** is processed through the **Flow** and how the **Verification Results** are captured at each **Step**. {% set video_id = '89be32d900ab36725e27cdcdab58328f' %} {% include-markdown 'includes/cloudflare_stream.md' %} After all Verification Steps are successfully completed, the **MAO** is automatically terminated. In the **Qualification** section of the **MAO** we can see that: * The `Litho_PM_Qualification` **Qualification Check** is `Completed`. * All **Verifications** have passed. * All Qualification Items change their state from `Open` to `Closed`. === "Qualification Checks" ![Screenshot showing the completion of qualification checks of the MAO when the restriction type is set to require specific](images/qualification_checks_require_specific_final.png) === "Qualification Checks: Verifications" ![Screenshot showing the completion of the verifications of the MAO when the restriction type is set to require specific](images/qualification_checks_verifications_require_specific_final.png) === "Qualification Items" ![Screenshot showing the completion of the qualification items of the MAO when the restriction type is set to require specific](images/qualification_items_require_specific_final.png) ## Qualification Check Summary The diagram below provides a high-level overview of the **Qualification Check** execution workflow. ![Diagram showing a summary of the qualification check execution](diagrams/qualification_check_execution.drawio.svg)