--- alias: user-guide-substrate-map-mask-index tags: - mapping description: "Substrate Map Masks define substrate layouts for precise material processing and pattern formation" --- # Substrate Map Mask :lock: SubstrateMapMask.**Show** A **Substrate Map Mask** is an entity that represents a mask of a substrate which can be a wafer, frame, strip or tray in SEMI E142 format (XML and Unit Level). The purpose of the **Substrate Map Mask** is essentially to control exposure and pattern formation on the surface of a **Material**, ensuring that only the desired areas undergo a certain process, such as etching, deposition, or chemical treatment. SEMI E142 is a standard that provides a way to report, store and transmit **Substrate Maps Masks** between semiconductor manufacturing sites by describing the layout of devices on a substrate. Your `xml` **Substrate Map Mask** content must comply with the following restrictions: * Contain a single **Substrate Map** with a single **Overlay** of type `BinCodeMap` with a single **Version** * Contain only two Bin Definitions with Bin Codes different from `NullBinValue`: * A `BinQuality` set to `“SetValue”` for which the `BinCount` must be > 0 * A `BinQuality` set to `“EmptyBinValue”` for which the `BinCount` must be >=0 !!! note The `“SetValue”` and `“EmptyBinValue”` are conventions used for the purposes of a **Substrate Map Mask**. See [[user-guide-substrate-map-mask-page]] for an [[user-guide-substrate-map-mask-page#example-of-substrate-map-mask-file|Example of Substrate Map Mask File]]. This Critical Manufacturing MES feature allows you to visualize an array of `xml` **Substrate Map Masks** because of the customizations performed on the original SEMI E142 standard. For more information, see [[user-guide-cm-semi-e142-schema]]. !!! info The Substrate Map Mask entity is part of Mapping which is a Critical Manufacturing optional module. To better understand the **Substrate Map Mask** entity, the following concepts and definitions are relevant: | Concept | Description | |---------------------------------------|----------------------------------| | Axis Direction (see also Origin Location) | Defines in which direction of the axis, X and Y, values increase. These can be Up Right, Down Right, Up Left, and Down Left. The default value is Up Right. | | Frame | A wafer mounted on a film frame so that it may be diced, and the die is picked and placed in a package. | | Layout | The logical and physical dimensions of a two-dimensional array of devices to which a map may be assigned. | | Map | A two-dimensional array of data for a specific layout on a substrate. | | Mask | A protective or selective layer used during manufacturing processes to define patterns or regions on a substrate.| | Orientation | The rotation of the substrate (0, 90, 180 or 270 degrees). The default value is zero. | | Origin Location | Where the (0,0) coordinate is located. It can be Lower Left, Lower Right, Upper Left, Upper Right or Center. The default value is Lower Left.| | Panel | A rectangular or square substrate on which an array of devices are fabricated. | | Strip | A lead frame, board, or other container on which an array of devices are fabricated. | | Substrate | A surface upon which something is deposited, etched, attached, or otherwise prepared or fabricated. Examples of substrates are wafers, frames, strips, and trays. | | Wafer | A round substrate on which an array of devices are fabricated. | Table 1: Substrate Map Mask Concepts and Definitions ## Tying Everything Together ```mermaid graph TD N1[Substrate Map Mask Content - Raw XML] --> Main Main[Substrate Map Mask] classDef mermaid_title color:#000, fill:#fafafa, stroke:#fafafa, stroke-width:0x, font-size:100%, font-weight:200; classDef mermaid_start color:#000, fill:#fafafa, stroke:#fafafa, color:#fafafa, stroke-width:0x, font-size:100%, visibility: hidden; classDef mermaid_businessdata color:#000, fill:#65CDE8, stroke:#65CDE8, stroke-width:0px, font-size:100%; classDef mermaid_nonbusinessdata color:#000, fill:#B7DEE8, stroke:#B7DEE8, stroke-width:0px, font-size:100%; classDef mermaid_entity color:#000, fill:#FB9F53, stroke:#FB9F53, stroke-width:0px, font-size:100%; classDef mermaid_entitylinked color:#000, fill:#FCD5B5, stroke:#FCD5B5, stroke-width:0px, font-size:100%; classDef mermaid_context color:#000, fill:#B9CDE5, stroke:#B9CDE5, stroke-width:0px, font-size:100%; classDef mermaid_optional color:#000, fill:#B7DEE8, stroke:#65CDE8, stroke-width:1px, font-size:100%, stroke-dasharray: 5 5; class Main mermaid_entity class A1 mermaid_businessdata class L1,L2,L3,L4,L5,L6,L7,L8,L9 mermaid_entitylinked class ST1 mermaid_context class N1,N2,N3,N4,N5,N6 mermaid_nonbusinessdata click Main "../../business-data/substrate-map-mask" ``` ## Sequence of Steps The necessary step for correctly creating and using a **Substrate Map Mask** is: 1. Create a [[user-guide-create-substrate-map-mask]]. {{ generate_index() }}