---
alias: tutorials-equipment-qualification-configuration
description: "Tutorial explaining how to configure an Equipment Qualification Check in Critical Manufacturing MES."
---

# Configuring a Qualification Check

In this section, we will configure a simple **Equipment Qualification** scenario typical in a semiconductor front-end manufacturing environment.

## Scenario

After preventive maintenance is performed on a critical lithography tool, the equipment must be requalified before it can process production wafers.

To achieve this, we will:

* Define a **Qualification Check**.
* Create a **Maintenance Plan** that triggers the **Qualification Check** workflow.
* Associate the **Maintenance Plan** with the target **Resource**.
* Link the **Qualification Check** to the appropriate Qualification Item.

When creating a **Maintenance Plan** and adding Maintenance Activities, there are two Type Restriction Modes available:

* **Require None** - the simplest scenario, where no **Materials** are required to perform the **Qualification Check**. In this mode, you need to manually set the **Qualification Result** (**Pass** or **Fail**).
* **Require Specific** - a more advanced scenario where at least one **Qualification Material** must follow a defined flow and Results are captured at **Verification Steps**. Results can be captured in different ways, depending on the Results Capture Mode configuration: manually, manually at track-out, through chart data points, through data collection points, or a combination of both.

The table below summarizes the **Steps** in the `Litho_Qualification` **Flow**, the associated **Resources**, and how each step participates in the **Qualification Check** scenario when Type Restriction Mode is set to `Require Specific`.

| Step                | Resource                |  Qualification Check Scenario    |
| ------------------- | ----------------------- | -------------------------------------------------------|
| WAFER UNLOAD        | WAFER_UNLOAD_STATION_01 | Assignment Step where the Qualification Materials are assigned|
| WAFER SAW           | DICING_SAW_01           | Resource to be Qualified |
| WAFER THIN INSPECT  | THICKNESS_METROLOGY_01  | Verification of Results: Manual|
| POST DICING INSPECT | OPTICAL_INSPECTION_01   | Verification of Results: Manual at Track-Out |
| DICING KERF INSPECT | KERF_METROLOGY_01       | Verification of Results: SPC With No Violation And DC Within Limits |

Table: Equipment Qualification Workflow

!!! tip "Master Data Model"
    You can download the Master Data Model used to configure this scenario [here](<master-data/equipment_qualification_tutorial.xlsx>).

## Step 1: Create Qualification Checks

The first step is to [[user-guide-create-qualification-check|create a Qualification Check]]. For this tutorial, create a **Qualification Check** named `Litho_PM_Qualification` and set the Instance Type to `Single`.

!!! info "Single vs Multiple Qualification Check"
    In Single mode, the system does not allow multiple MAOs with Qualification Items targeting the same Resource, Resource Service, or Resource Recipe at the same time. In Multiple mode, multiple MAOs can include Qualification Items for the same Resource, Resource Service, or Resource Recipe.

![Screenshot showing how to create a qualification check](images/create_qualification_check_tutorial.png)

## Step 2: Associate Qualification Items

The next configuration step is to associate the **Qualification Items**. In this scenario, the **Qualification Check** will be executed for the `DICING_SAW_01` Resource.
To do this:

1. Open the **Resource** page for `DICING_SAW_01`.
2. Select **Edit**.
3. Navigate to the **Additional Information** tab.
4. Add the `Litho_PM_Qualification` **Qualification Check**.
5. Select **Save**.

![Screenshot showing how to edit a resource to add the qualification check](images/add_qualification_check_resource.png)

In addition to qualifying the Resource, we will also qualify the `DICING_SERVICE` Service.

To configure this:

1. Open the `DICING_SAW_01` **Resource** page.
2. Navigate to the **Services** section.
3. Select **Manage**.
4. Add the `Litho_PM_Qualification` **Qualification Check**.
5. Select **Update**.

![Screenshot showing how to edit a resource to add the qualification check](images/manage_qualification_check_services.png)

## Step 3: Create Maintenance Plan

Next, we must [[user-guide-create-maintenance-plan|create a Maintenance Plan]] that includes the **Qualification Check** created in step 1.

Configure the **Maintenance Plan** with the following information:

* Name - `Litho_PM_Qualification_Plan`
* Type - `Standard`
* Scope - `Qualification`

![Screenshot showing how to create a maintenance plan](images/create_maintenance_plan_tutorial.png)

### Create Maintenance Activities

After creating the **Maintenance Plan**, we must [[user-guide-create-maintenance-plan#step-3-adding-maintenance-activities|add Maintenance Activities]].

In this scenario, we will configure two **Maintenance Activities**:

* `Litho_Preventive_Maintenance` - where the Type Restriction Mode is set to `Require None`;
* `Litho_PM_Execution` - where the Type Restriction Mode is set to `Require Specific`.

This property determines how the **Qualification Check** is executed:

* When `Require None` is used, the **Qualification Check** is performed directly during the execution of the **Maintenance Activity Order** (MAO).
* When `Require Specific` is used, the **Qualification Check** entails capturing **Verification Results** separately.

For more information about executing the Qualification Check, see [[tutorials-equipment-qualification-execution]].

Configure the **first Maintenance Activity** with the following **General Data**:

* Name - `Litho_Preventive_Maintenance`
* Description - `Litho_Preventive_Maintenance`
* Type - `Standard`
* Schedule Type - `Adhoc`
* Expected Duration (Hours) - `2`
* Execution Role - `Quality Control`
* Request Approval Mode - `Auto Approval`
* Order Release Mode - `Auto Release`
* Acceptance Mode - `Auto Acceptance`

![Screenshot showing how to configure the general data of a maintenance activity](images/create_maintenance_activity_general_data_require_none.png)

Next, configure the **Qualification** tab:

* Auto Begin Qualification - `Enabled`
* Type Restriction Mode - `Require None`

![Screenshot showing how to configure the qualification information of a maintenance activity](images/create_maintenance_activity_qualification_require_none.png)

Finally, associate the **Qualification Check** with the **Maintenance Activity**. To do so, select the **Manage** button, add the `Litho_PM_Qualification` Qualification Check, and set the Item Disable Mode to `When in Progress`. This means that the Qualification Item will be disabled once the Maintenance Activity is `In Progress`.

!!! info "Item Disabled Mode"
    If the Qualification Item is a Resource, it will only be disabled if the Resource has a State Model configured (for example, `SEMI 10`). The other types of Qualification Items cannot be used while the Qualification Check is active.

    For more information on the options for the Item Disable Mode property, see [[user-guide-create-maintenance-plan#step-3-adding-maintenance-activities]].

![Screenshot showing how to manage the maintenance activity qualification check](images/manage_maintenance_activity_qualification_check_require_none.png)

Configure the **second Maintenance Activity** with the following **General Data**:

* Name - `Litho_PM_Execution`
* Description - `Litho_PM_Execution`
* Type - `Standard`
* Schedule Type - `Adhoc`
* Expected Duration (Hours) - `2`
* Execution Role - `Quality Control`
* Request Approval Mode - `Auto Approval`
* Order Release Mode - `Auto Release`
* Acceptance Mode - `Auto Acceptance`

![Screenshot showing how to configure the general data of a maintenance activity](images/create_maintenance_activity_general_data_require_specific.png)

Then configure the **Qualification** tab:

* Auto Begin Qualification - `Enabled`
* Auto Complete Qualification - `Enabled`
* Type Restriction Mode - `Require Specific`
* Type - `Engineering`
* Product - `Litho_Monitor_Wafer`
* Step - `Wafer Unload`

!!! note
    When Auto Complete Qualification is enabled, the MAO is automatically completed once all qualification results have been captured - provided the MAO can be closed: Data Collection (if any) is filled, Checklist (if any) is complete, and Parts (if any) are filled.

!!! info "Manage Qualification Materials"
    When adding Qualification Materials, the Material Type must match Type defined here. In this scenario, the Type is set to ´Engineering`, therefore the Qualification Materials must also have the same Material Type. For more information, see [[user-guide-manage-qualification-materials]].

![Screenshot showing how to configure the qualification information of a maintenance activity when the type restriction mode is set to require specific](images/create_maintenance_activity_qualification_require_specific.png)

!!! info "Compose BOM and Experiments"
    Qualification Materials do not need to be pre-existing. Materials can be created on the fly using a BOM of scope Compose. For more information, see [[tutorials-bom-index]]. Alternatively, an Experiment can be used to route existing Materials to the required Step. For more information, see [[tutorials-experiment-management-index|Experiment Management Tutorial]].

Next, associate the **Qualification Check** with the second Maintenance Activity. Since the Type Restriction Mode is set to `Require Specific`, both Qualification Details and Verification Details must be configured.

In the **Qualification Checks** step, configure the following **Qualification Details**:

* Qualification Check - `Litho_PM_Qualification`
* Item Disable Mode - `When In Progress`
* Selection Mode - `Step`
* Execution Step - `WAFER SAW`

This configuration indicates that the **Qualification Check** execution will occur at the `WAFER SAW` Step, where the `DICING_SAW_01` Resource is used.

![Screenshot showing the Qualification Checks step of the manage maintenance activity qualification checks wizard](images/wizard_manage_maintenance_activity_qualification_check_step_1.png)

Select **Next** to open the **Verifications** step and configure three **Verification Steps** that determine how Results are captured.

=== "Verification 1"

    * Results Capture Mode - `Manual`
    * Skippable - `Disabled`
    * Selection Mode - `Step`
    * Verification Step - `WAFER THIN INSPECT`

=== "Verification 2"

    * Results Capture Mode - `Manual At Track Out`
    * Skippable - `Disabled`
    * Selection Mode - `Step`
    * Verification Step - `POST DICING INSPECT`

=== "Verification 3"

    * Results Capture Mode - `SPC With No Violation And DC Within Limits`
    * Skippable - `Enabled`
    * Selection Mode - `Step`
    * Verification Step - `DICING KERF INSPECT`

![Screenshot showing the Verifications step of the manage maintenance activity qualification checks wizard](images/wizard_manage_maintenance_activity_qualification_check_step_2.png)

!!! info "Check If Reachable"
    The Check If Reachable button verifies whether the Step is reachable within the selected Flow. This option is available for both the Execution Step and the Verification Step. For this validation to work, a Flow must be defined both when assigning the Qualification Material and in the Execution Flow.

Once the Qualification and Verification details are configured, the **Maintenance Plan** can be finalized. To complete the configuration:

1. **Save** the Maintenance Plan.
2. Select **Request Approval**.
3. Set the plan as **Effective**.

!!! info "Qualification Scope Validation"
    A **Maintenance Plan** with scope **Qualification** can only be set as **Effective** if all configured Assignment, Execution, and Verification points remain valid for the configured Selection Mode (**Step**, **Flow Path**, or **Logical Flow Path**).

## Step 4: Create a Maintenance Plan Instance

The final step is to create a **Maintenance Plan Instance** by associating the **Maintenance Plan** with either an [[user-guide-associate-with-area|Area]] or a [[user-guide-associate-with-resource|Resource]].

!!! note
    When the Maintenance Plan is associated with an Area, the qualification is applied to all Resources assigned to that Area.

In this tutorial, we will associate the Maintenance Plan with the `DICING_SAW_01` Resource. To do this:

1. Select **Associate with** from the top ribbon.
2. Choose **Resource**.
3. Add the `DICING_SAW_01` Resource.

![Screenshot showing how to associate a maintenance plan with a resource](images/associate_maintenance_plan_resource.png)

Next, confirm the Maintenance Activities that will be performed for the selected Resource and select **Next**.

![Screenshot showing how to associate a maintenance plan with a resource - Maintenance Activities](images/associate_maintenance_plan_maintenance_activities.png)

Finally, specify the **Owner Role**.

![Screenshot showing how to associate a maintenance plan with a resource - Maintenance Activities](images/associate_maintenance_plan_general_data.png)

!!! tip "Configuration Completed"
    At this point, the configuration of the Qualification Check is complete. The next step is to execute the Qualification Check workflow. For more information, see [[tutorials-equipment-qualification-execution]].

## Qualification Check Configuration Summary

The diagram below summarizes the configuration steps performed in this tutorial to set up the **Qualification Check** scenario.

![Diagram showing a summary of the qualification check configuration](diagrams/qualification_check_configuration.drawio.svg)