Performing a Qualification Check#

Requesting Maintenance Activities#

After associating the Qualification Items, we can open the Maintenance view of the DICING_SAW_01 Resource to request the ad hoc Maintenance Activities.

This can be done in two ways:

• Dragging and dropping each Maintenance Activity into the calendar view.
• Using the Request button from the top ribbon to request both activities at the same time.

In both cases, we must specify the Executed by role. This role must match the Owner Role defined in step 4 (in this scenario, Quality Control).

We can also enable the options to Approve Maintenance Activity Orders and Release Maintenance Activity Orders to skip those manual steps. After selecting Request, two MAOs are opened:

• One MAO for the Maintenance Activity where the Type Restriction Mode is set to Require None.
• One MAO for the Maintenance Activity where the Type Restriction Mode is set to Require Specific.

As previously mentioned, the Qualification Check workflow differs depending on the Type Restriction Mode selected. The sections below describe how each scenario is handled.

Type Restriction Mode: Require None#

A Maintenance Activity with the Type Restriction Mode set to Require None is the simplest way to perform a Qualification Check. After requesting the MAO, and if the Approve and Release options were enabled during the request, the MAO will already be ready for execution.

Navigating to the Qualifications section shows that the Litho_PM_Qualification Qualification Check is In Progress. Switching to the Qualification Items tab, shows the two Qualification Items configured earlier.

Because the Item Disable Mode was set to When In Progress, and the Qualification Check is currently In Progress, the DICING_SAW_01Resource state has changed from Standby to Scheduled Down.

To perform the Qualification Check, first ensure that all tasks associated with the Maintenance Plan (such as Checklists or Data Collections) have been completed. Then, select the Complete button from the top ribbon. Since the Resource is configured with a State Model, a new state can be selected. By default, the state is Standby, although it can be overridden if required.

Next, we must classify the Results of the Qualification Check. Two outcomes are possible: Pass or Fail.

Result: Pass#

If the Resource successfully passes the Qualification Check, select Pass and choose Complete.

This will terminate the MAO and change the state of the Qualification Check to Complete. The details of the Qualification Check and Qualification Items can be reviewed in the Qualification section of the MAO.

Result: Fail#

If the DICING_SAW_01 Resource does not meet the qualification criteria, set the Result to Fail.

Whenever a Result is set to Fail, the system automatically creates a rework of the MAO, as shown below.

In this case, the MAO will also be terminated but the Qualification Check will remain as In Progress. The details of the Qualification Check and Qualification Items can be reviewed in the Qualification section of the MAO.

To complete the Qualification Check, simply navigate to the newly created MAO and repeat the process.

Type Restriction Mode: Require Specific#

When a Qualification Check workflow requires processing Materials and Verification Steps, the Type Restriction Mode should be set to Require Specific. This mode enables more advanced qualification scenarios, where Materials are processed through a Flow and Verification Results are captured at specific Steps.

As in the previous scenario, the Qualification Checks and Qualification Items can be viewed from the Qualifications section of the MAO. However, in this case an additional Verifications view is available. The Verifications table summarizes how the Results will be captured and at which Step the Verification will occur.

Manage Qualification Materials#

Before capturing the Results, we must assign a Qualification Material to the MAO. To do this:

1. Navigate to the Materials section of the MAO.
2. Select Manage Materials.
3. In this scenario, add the Litho_Monitor_Wafer_001 Material.

Once the Material is assigned to the MAO, the Qualification Check workflow can begin.

Capturing Verification Results#

According to the scenario defined in Configuring a Qualification Check, the Litho_Monitor_Wafer_001 Material must be processed through the Litho_Qualification Flow.

Opening the Litho_Monitor_Wafer_001 Material page shows that the material is initially located at the Assignment Step ( WAFER UNLOAD). From here:

1. Dispatch and Track-In the Material.
2. Track-Out and Move-Next to the Execution Step (WAFER SAW), where the Qualification Check will be performed.

Alternatively, we can perform the same operations from the WAFER UNLOAD Step view. In this view, the Qualification Materials are identified by a icon.

When the Material is dispatched and tracked-in in the Execution Step, the Qualification Check state changes from Started to In Progress. Additionally, since the Item Disable Mode is set to When In Progress, the DICING_SAW_01 Resource changes state from Standby to Schedule Down.

The video at the end of Verification 3 demonstrates how a Qualification Material is processed through the Flow, and triggers the Qualification Check when reaching the Execution Step.

The following sections demonstrate how each Verification mode works.

Verification 1: Manual#

After the Material is processed through the WAFER SAW Step, it reaches the first Verification Step: WAFER THIN INSPECT. This Verification uses the Manual Results Capture Mode.

To record the Results:

1. Return to the MAO.
2. Select the corresponding Verification.
3. Select Record Results.
4. In the wizard, manually select either Pass or Fail.
5. For this tutorial, select Pass, then choose Record.

After recording the Result, the Verification status is updated in the Qualification section of the MAO.

Verification 2: Manual At Track-Out#

The second Verification occurs at the POST DICING INSPECT Step. This Verification uses the Manual At Track-Out Results Capture Mode. To perform this Verification:

1. Dispatch and Track-In the Material.
2. Perform Track-Out and Move-Next.
3. During the Track-Out operation, the wizard prompts us to set the Verification result.

For demonstration purposes:

1. First select Fail.
2. Then use Clear Results to reset the Verification.
3. Finally record the Result as Pass.

The updated result can then be viewed in the Verification section of the MAO.

Verification 3: SPC With No Violation And DC Within Limits#

The final Verification occurs at the DICING KERF INSPECT Step. This Verification uses the SPC With No Violation And DC Within Limits Results Capture Mode.

Since this Verification was configured as Skippable, two options are available:

• Skip the Verification.
• Perform the Verification by processing the Material.

To perform the verification:

1. Dispatch and Track-In the Material.
2. Perform Track-Out and Move-Next.
3. Post the required Data Collection.
4. Once the operation is completed, the SPC Chart is shown.

If no SPC violations are detected and the Data Collection values are within limits, the Verification automatically passes.

The video below demonstrates the full Qualification Check execution workflow, including how the Material is processed through the Flow and how the Verification Results are captured at each Step.

After all Verification Steps are successfully completed, the MAO is automatically terminated. In the Qualification section of the MAO we can see that:

• The Litho_PM_Qualification Qualification Check is Completed.
• All Verifications have passed.
• All Qualification Items change their state from Open to Closed.

Qualification Check Summary#

The diagram below provides a high-level overview of the Qualification Check execution workflow.