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Substrate Map Mask#

🔒 SubstrateMapMask.Show

A Substrate Map Mask is an entity that represents a mask of a substrate which can be a wafer, frame, strip or tray in SEMI E142 format (XML and Unit Level).

The purpose of the Substrate Map Mask is essentially to control exposure and pattern formation on the surface of a Material, ensuring that only the desired areas undergo a certain process, such as etching, deposition, or chemical treatment.

SEMI E142 is a standard that provides a way to report, store and transmit Substrate Maps Masks between semiconductor manufacturing sites by describing the layout of devices on a substrate.

Your xml Substrate Map Mask content must comply with the following restrictions:

  • Contain a single Substrate Map with a single Overlay of type BinCodeMap with a single Version
  • Contain only two Bin Definitions with Bin Codes different from NullBinValue:
    • A BinQuality set to “SetValue” for which the BinCount must be > 0
    • A BinQuality set to “EmptyBinValue” for which the BinCount must be >=0

Note

The “SetValue” and “EmptyBinValue” are conventions used for the purposes of a Substrate Map Mask. See Substrate Map Mask Page for an Example of Substrate Map Mask File.

This Critical Manufacturing MES feature allows you to visualize an array of xml Substrate Map Masks because of the customizations performed on the original SEMI E142 standard. For more information, see CM SEMI E142 schema.

Info

The Substrate Map Mask entity is part of Mapping which is a Critical Manufacturing optional module.

To better understand the Substrate Map Mask entity, the following concepts and definitions are relevant:

Concept Description
Axis Direction (see also Origin Location) Defines in which direction of the axis, X and Y, values increase. These can be Up Right, Down Right, Up Left, and Down Left. The default value is Up Right.
Frame A wafer mounted on a film frame so that it may be diced, and the die is picked and placed in a package.
Layout The logical and physical dimensions of a two-dimensional array of devices to which a map may be assigned.
Map A two-dimensional array of data for a specific layout on a substrate.
Mask A protective or selective layer used during manufacturing processes to define patterns or regions on a substrate.
Orientation The rotation of the substrate (0, 90, 180 or 270 degrees). The default value is zero.
Origin Location Where the (0,0) coordinate is located. It can be Lower Left, Lower Right, Upper Left, Upper Right or Center. The default value is Lower Left.
Panel A rectangular or square substrate on which an array of devices are fabricated.
Strip A lead frame, board, or other container on which an array of devices are fabricated.
Substrate A surface upon which something is deposited, etched, attached, or otherwise prepared or fabricated. Examples of substrates are wafers, frames, strips, and trays.
Wafer A round substrate on which an array of devices are fabricated.

Table 1: Substrate Map Mask Concepts and Definitions

Tying Everything Together#

graph TD
    N1[Substrate Map Mask Content - Raw XML] --> Main
    Main[Substrate Map Mask]

classDef mermaid_title color:#000, fill:#fafafa, stroke:#fafafa, stroke-width:0x, font-size:100%, font-weight:200;
classDef mermaid_start color:#000, fill:#fafafa, stroke:#fafafa, color:#fafafa, stroke-width:0x, font-size:100%, visibility: hidden;
classDef mermaid_businessdata color:#000, fill:#65CDE8, stroke:#65CDE8, stroke-width:0px, font-size:100%;
classDef mermaid_nonbusinessdata color:#000, fill:#B7DEE8, stroke:#B7DEE8, stroke-width:0px, font-size:100%;
classDef mermaid_entity color:#000, fill:#FB9F53, stroke:#FB9F53, stroke-width:0px, font-size:100%;
classDef mermaid_entitylinked color:#000, fill:#FCD5B5, stroke:#FCD5B5, stroke-width:0px, font-size:100%;
classDef mermaid_context color:#000, fill:#B9CDE5, stroke:#B9CDE5, stroke-width:0px, font-size:100%;
classDef mermaid_optional color:#000, fill:#B7DEE8, stroke:#65CDE8, stroke-width:1px, font-size:100%, stroke-dasharray: 5 5;
class Main mermaid_entity
class A1 mermaid_businessdata
class L1,L2,L3,L4,L5,L6,L7,L8,L9 mermaid_entitylinked
class ST1 mermaid_context
class N1,N2,N3,N4,N5,N6 mermaid_nonbusinessdata

click Main "../../business-data/substrate-map-mask"

Sequence of Steps#

The necessary step for correctly creating and using a Substrate Map Mask is:

  1. Create a Create Substrate Map Mask.

Available Pages#

Dive into the pages below to explore more about Substrate Map Mask:

Main Page#

Generic Operations#

Specific Operations#