---
title: DeviceTraceability
alias: dataplatform-dataset-devicetraceability
docsync: true
description: "This dataset contains fields for device traceability"
---

# DeviceTraceability DataSet

Source: MES

## Fields

The **DeviceTraceability** Data Set has the following fields:

| Field | Description | DataType | Field Type |
| --- | ----- | ----- | -- |
| **CreatedOn** |  | DateTime | Timestamp |
| **ModifiedOn** |  | DateTime | Timestamp |
| **CreatedBy** |  | String | Dimension |
| **ModifiedBy** |  | String | Dimension |
| **Enterprise** |  | String | Dimension |
| **Site** |  | String | Dimension |
| **Facility** |  | String | Dimension |
| **Step** |  | String | Dimension |
| **Resource** |  | String | Dimension |
| **Class** |  | String | Dimension |
| **SourceSubstrateMap** |  | String | Dimension |
| **SourceOverlayType** |  | String | Dimension |
| **SourceOverlay** |  | String | Dimension |
| **FromSubstrateMap** |  | String | Dimension |
| **FromSubstrateId** |  | String | Dimension |
| **FromSubstrateSide** |  | String | Dimension |
| **FromSubstrateType** |  | String | Dimension |
| **FromOverlayMapName** |  | String | Dimension |
| **FromOverlayMapVersion** |  | String | Dimension |
| **FromLotId** |  | String | Dimension |
| **FromLayoutSpecifier** |  | String | Dimension |
| **FromSubstrateAlias1Type** |  | String | Dimension |
| **FromSubstrateAlias1Value** |  | String | Dimension |
| **FromSubstrateAlias2Type** |  | String | Dimension |
| **FromSubstrateAlias2Value** |  | String | Dimension |
| **FromDeviceId** |  | String | Dimension |
| **FromX** |  | Integer | Metric |
| **FromY** |  | Integer | Metric |
| **FromSubstrateX** |  | Integer | Metric |
| **FromSubstrateY** |  | Integer | Metric |
| **FromSubstrateLID** |  | String | Dimension |
| **ToSubstrateId** |  | String | Dimension |
| **ToSubstrateSide** |  | String | Dimension |
| **ToSubstrateType** |  | String | Dimension |
| **ToSubstrateMap** |  | String | Dimension |
| **ToOverlayMapName** |  | String | Dimension |
| **ToOverlayMapVersion** |  | String | Dimension |
| **ToLotId** |  | String | Dimension |
| **ToLayoutSpecifier** |  | String | Dimension |
| **ToSubstrateAlias1Type** |  | String | Dimension |
| **ToSubstrateAlias1Value** |  | String | Dimension |
| **ToSubstrateAlias2Type** |  | String | Dimension |
| **ToSubstrateAlias2Value** |  | String | Dimension |
| **ToDeviceId** |  | String | Dimension |
| **ToX** |  | Integer | Metric |
| **ToY** |  | Integer | Metric |
| **ToZ** |  | Integer | Metric |
| **ToSubstrateX** |  | Integer | Metric |
| **ToSubstrateY** |  | Integer | Metric |
| **ToSubstrateLID** |  | String | Dimension |
| **ToDeviceX** |  | Integer | Metric |
| **ToDeviceY** |  | Integer | Metric |
| **ToDeviceZ** |  | Integer | Metric |
| **ServiceHistoryId** |  | Integer | Metric |
| **OperationHistorySequence** |  | Integer | Metric |

Table: DeviceTraceability fields