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Example Scenarios#

Happy path of Lot with a Single Wafer on a Container (300mm)#

For this scenario we will consider:

  • A Parent Material with a single wafer;
  • An available Load Port on the Equipment;
  • A Container where the single wafer is set;
  • Slot Map and Recipe are valid;
  • It uses Unformatted Version.

HappyPath1

Material Arrived#

Set Load Port Sub-Resource Main State Model to Transfer Blocked.

Id Read#

Create Container Data on Persistence. Dock Container on Load Port and Validate Docking. Update Container Data on Persistence with Slot, States. Send Proceed With Carrier.

Slot Map Read#

Update Equipment Slot Map on Container Date. Validate Slot Map against Container Data. Send Proceed With Carrier. Execute Material In, this will execute Track In.

Execute Track In#

Receive Action Group Track In. Validate Control State, Slot Map and Cassette Present. Request Recipe List (S7F19) and validate PPID exists on the Recipe List. Request Recipe Body (S7F5) from tool and validate Checksum matches MES stored Checksum. Create Process Job (S16F11). Create Control Job (S14F9). Store Material Data.

Process Start#

Process Start change Material State to In Progress on MES. Change Material Data State to In Process.

Wafer Started#

Execute Material In for Sub-Material, this will execute Track In. Update Material Data Sub-Material State to In Process.

Wafer Complete#

Execute Material Out for Sub-Material, this will execute Track Out. Update Material Data SubMaterial State to Complete.

Process Complete#

Process Start change Material State to Complete on MES. Change Material Data State to Complete. Execute Material Out for Parent Material, this will execute Track Out. Receive Action Group Track Out and delete Material Data.

Ready to Unload#

Set Load Port Sub-Resource Main State Model to Ready to Unload.

Material Removed#

Set Load Port Sub-Resource Main State Model to Ready to Load. Undock Container from Load Port and delete Container Data.