Skip to content

E30 Process State

Process State Attribute#

E30 defines an example of the Processing State diagram, which can be implemented by the tool supplier.

Process State Model

On MES this will be set in the SemiE30ProcessingState attribute of the Resource.

To track the tool Process State by using E30 you should use the workflow ResourceState_01_ProcessStateChangeReceived and the workflow task to use the UpdateE30EquipmentProcessingState.