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Naming and Report Conventions#

Why follow conventions?#

Following naming conventions will allow you to maximize the use of templated functionalities, letting you go as far as letting you easily cover the testing of the functionalities on our internal testing framework and classes.

Report Id Guidelines#

The guidelines stated on this chapter have only the intent to help keep coherence between all the projects that are developed using this template.
In this case the intent is to help maintenance and debug from a developer's/maintenance engineer's perspective.

Report Topic Report Id Rang Range Reseverd Range For Custom Reports
Load Port Related 100 to 199 100 to 110 111 to 199
Carrier Related 200 to 299 200 to 210 211 to 299
Control Job Related 300 to 399 300 to 310 311 to 399
Process Job Related 400 to 499 400 to 410 411 to 499
Substrate Related 500 to 599 500 to 510 511 to 599
Generic Data Collection Related 600 to 699 N/A 600 to 699
Equipment States Related 700 to 799 700 to 710 711 to 799
Custom Reports 800 upwards N/A 800 upwards

Carrier Management (CMS) - E87#

Load Port Transfer#

Events#

State Model Transition Template Event Name Template Description Comment
E87 LPT 1 LoadPortTransferSMTrans01 (no state) to Out of Service or In Service (history)
E87 LPT 2 LoadPortTransferSMTrans02 Out of Service to In Service
E87 LPT 3 LoadPortTransferSMTrans03 In Service to Out of Service
E87 LPT 4 LoadPortTransferSMTrans04 In Service to Transfer Ready or Transfer Blocked
E87 LPT 5 LoadPortTransferSMTrans05 Transfer Ready to Ready to Load or Ready to Unload Carrier Id is available for this event
E87 LPT 6 LoadPortTransferSMTrans06 Ready to Load to Transfer Blocked
E87 LPT 7 LoadPortTransferSMTrans07 Ready to Unload to Transfer Blocked
E87 LPT 8 LoadPortTransferSMTrans08 Transfer Blocked to Ready to Load
E87 LPT 9 LoadPortTransferSMTrans09 Transfer Blocked to Ready to Unload Carrier Id is available for this event
E87 LPT 10 LoadPortTransferSMTrans10 Transfer Blocked to Transfer Ready

Report Content#

Report 101#

This report is valid for the following events:

  • E87 LPT 1
  • E87 LPT 2
  • E87 LPT 3
  • E87 LPT 4
  • E87 LPT 6
  • E87 LPT 7
  • E87 LPT 8
  • E87 LPT 10

The report as the following structure:

Variable Name Template Variable Description Comment
PortId
PortTransferState
Report 102#

This report is valid for the following events:

  • E87 LPT 5
  • E87 LPT 9

The report as the following structure:

Variable Name Template Variable Description Comment
PortId
PortTransferState
CarrierId

Carrier#

Events#

State Model Transition Template Event Name Template Description Comment
E87 CSM 1 CarrierSMTrans01 (no state) to Carrier A carrier is instantiated
E87 CSM 2 CarrierSMTrans02 (no state) to Id Not Read Normal: A Bind or Carrier Notification service is received
E87 CSM 3 CarrierSMTrans03 (no state) to Waiting for Host Normal: A carrierID not currently existing at the equipment is successfully read.
Abnormal: A carrierID is read successfully but an equipment based verification failed.
E87 CSM 4 CarrierSMTrans04 (no state) to Id Verification Ok A carrier is instantiated having the carrierID provided by the Proceed With Carrier service
E87 CSM 5 CarrierSMTrans05 (no state) to Id Verification Fail A carrier is instantiated having the carrierID provided by the Cancel Carrier service.
E87 CSM 6 CarrierSMTrans06 Id Not Read to Id Verification Ok Carrier ID is read successfully and the equipment has verified the carrierID successfully
E87 CSM 7 CarrierSMTrans07 Id Not Read to Waiting for Host Carrier ID is read unsuccessfully or is waiting verification
E87 CSM 8 CarrierSMTrans08 Waiting for Host to Id Verification Ok A ProceedWithCarrier service is received
E87 CSM 9 CarrierSMTrans09 Waiting for Host to Id Verification Failed A Cancel Carrier Service is received.
E87 CSM 10 CarrierSMTrans10 Id Not Read to Waiting for Host BypassReadID variable is set to FALSE, and a carrier is received when the id reader is not in service or not installed.
E87 CSM 11 CarrierSMTrans11 Id Not Read to Id Verification Ok BypassReadID variable is set to TRUE, and a carrier is received when the id reader is not in service or not installed.
E87 CSM 12 CarrierSMTrans12 (no state) to Slot Map Not Read A carrier is instantiated
E87 CSM 13 CarrierSMTrans13 Slot Map Not Read to Slot Map Verification Ok Slot Map is read and verified successfully by the equipment
E87 CSM 14 CarrierSMTrans14 Slot Map Not Read to  Waiting for Host Normal host based verification: Slot Map is read successfully and the equipment is waiting for host verification.
Equipment based verification fail: Slot Map is read successfully but equipment based verification has failed.
Slot map read fail: Slot Map cannot be read.
Abnormal Substrate position within the carrier: The Slot Map read has indicated an abnormal Substrate position.
E87 CSM 15 CarrierSMTrans15 Waiting for Host to Slot Map Verification Ok A ProceedWithCarrier service is received.
E87 CSM 16 CarrierSMTrans16 Waiting for Host to Slot Map Verification Fail A CancelCarrier service is received.
E87 CSM 17 CarrierSMTrans17 (no state) to Not Accessed A carrier object is instantiated.
E87 CSM 18 CarrierSMTrans18 Not Accessed to In Access The equipment starts accessing the carrier.
E87 CSM 19 CarrierSMTrans19 In Access to Carrier Complete The equipment finishes accessing the carrier normally
E87 CSM 20 CarrierSMTrans20 In Access to Carrier Stopped The equipment finishes accessing the carrier abnormally
E87 CSM 21 CarrierSMTrans21 Carrier to (no state) Normal: The carrier is unloaded from the equipment.
Abnormal by service: CancelBind or CancelCarrierNotification service is received prior to the carrier load.
Abnormal by equipment: An equipment based verification fails and the equipment performs a self-initiated CancelBind service.

Report Content#

Report 201#

This report is valid for the following events:

  • E87 CSM 2
  • E87 CSM 4
  • E87 CSM 5

The report as the following structure

Variable Name Template Variable Description Comment
CarrierIDStatus
CarrierId
Report 202#

This report is valid for the following events:

  • E87 CSM 3
  • E87 CSM 6
  • E87 CSM 7
  • E87 CSM 8
  • E87 CSM 9
  • E87 CSM 10
  • E87 CSM 11

The report as the following structure

Variable Name Template Variable Description Comment
CarrierIDStatus
CarrierId
PortID
Report 203#

This report is valid for the following events:

  • E87 CSM 13
  • E87 CSM 16

The report as the following structure

Variable Name Template Variable Description Comment
CarrierId
PortID
LocationID
CarrierAccessingStatus
SlotMapStatus
Report 204#

This report is valid for the following events:

  • E87 CSM 14

The report as the following structure

Variable Name Template Variable Description Comment
CarrierId
PortID
LocationID
SlotMap
Reason
SlotMapStatus
Report 205#

This report is valid for the following events:

  • E87 CSM 15

The report as the following structure

Variable Name Template Variable Description Comment
CarrierId
PortID
LocationID
SlotMapStatus
Report 206#

This report is valid for the following events:

  • E87 CSM 18
  • E87 CSM 19
  • E87 CSM 20

The report as the following structure

Variable Name Template Variable Description Comment
CarrierId
CarrierAccessingStatus

Control Job Management - E94#

Events#

State Model Transition Template Event Name Template Description Comment
E94 CJ 1 ControlJobSMTrans01 (no state) to Queued Receive “Create” command from host or operator through operator console.
E94 CJ 2 ControlJobSMTrans02 Queued to (no state) Receive “Cancel”, “Abort”, or
“Stop” command from host or operator through operator console
E94 CJ 3 ControlJobSMTrans03 Queued to Selected The processing resource has capacity to begin work on the next ControlJob.
E94 CJ 4 ControlJobSMTrans04 Selected to Queued Receive “De-select” command from host or operator through operator console and materials for the control job have not arrived yet.
E94 CJ 5 ControlJobSMTrans05 Selected to Executing Material for the first process job arrives or in the case where the first (or only) process job does not require material, this transition shall be taken as soon as the processing resource for that process job  becomes available. “StartMethod” attribute in the ControlJob is set for Auto
E94 CJ 6 ControlJobSMTrans06 Selected to Waiting for Start Same as for transition 5 except that the “StartMethod” attribute in the control job is set for user start.
E94 CJ 7 ControlJobSMTrans07 Waiting for Start to Executing User START command received
E94 CJ 8 ControlJobSMTrans08 Executing to Paused Received “Pause” message from host or operator through operator console or a ControlJob. PauseEvent has occurred.
E94 CJ 9 ControlJobSMTrans09 Paused to Executing Receive “Resume” message from host or operator through operator console.
E94 CJ 10 ControlJobSMTrans10 Executing to Completed All the ProcessJobs specified for the ControlJob have completed
E94 CJ 11 ControlJobSMTrans11 Active to Completed Receive “CJStop” message from host or operator through operator console or all the process jobs under the ControlJob have been stopped and material processing is stopped.
E94 CJ 12 ControlJobSMTrans12 Active to Completed Receive “CJAbort” command from host or operator through operator console or all the process jobs under the ControlJob have been aborted and material processing is aborted.
E94 CJ 13 ControlJobSMTrans13 Completed to (no state) The ControlJob is deleted

Reports#

Report 301#

This report is valid for the following events:

  • E94 CJ 1
  • E94 CJ 2
  • E94 CJ 3
  • E94 CJ 4
  • E94 CJ 5
  • E94 CJ 6
  • E94 CJ 7
  • E94 CJ 8
  • E94 CJ 9
  • E94 CJ 10
  • E94 CJ 11
  • E94 CJ 12
  • E94 CJ 13

The report as the following structure

Variable Name Template Variable Description Comment
ControlJobId
ControlJobState

Processing Management - E40#

Events#

State Model Transition Template Event Name Template Description Comment
E40 PJ 1 ProcessJobSMTrans01 (no state) to Queued/Pooled The processing resource accepts a Process Job create request.
E40 PJ 2 ProcessJobSMTrans02 Queued/Pooled to Setting Up The processing resource has been allocated to the Process Job.
E40 PJ 3 ProcessJobSMTrans03 Setting Up to Waiting for Start Job material is present AND the processing resource is ready to start the process job AND PRProcessStart attribute is not set
E40 PJ 4 ProcessJobSMTrans04 Setting Up to Processing Material is present and ready for processing. PRProcessStart attribute is set
E40 PJ 5 ProcessJobSMTrans05 Waiting for Start to Processing Job Start directive
E40 PJ 6 ProcessJobSMTrans06 Processing to Process Complete Material processing completed
E40 PJ 7 ProcessJobSMTrans07 Process Complete to (no state) Job material departed the processing resource AND resource post-conditioning completed, OR superceded by another process job on the same material
E40 PJ 8 ProcessJobSMTrans08 Executing to Pausing The processing resource initiated a process pause action. (it received a PAUSE command or initiated an internal pause)
E40 PJ 9 ProcessJobSMTrans09 Pausing to Paused The processing resource paused the job.
E40 PJ 10 ProcessJobSMTrans10 Paused to Executing The processing resource resumed the job.
E40 PJ 11 ProcessJobSMTrans11 Executing to Stopping The processing resource initiated a process stop action. (it received a STOP command or initiated an internal stop)
E40 PJ 12 ProcessJobSMTrans12 Pause to Stopping The processing resource initiated a process stop action. (it received a STOP command or initiated an internal stop)
E40 PJ 13 ProcessJobSMTrans13 Executing to Aborting The processing resource initiated a process abort action. (it received an ABORT command or initiated an internal abort)
E40 PJ 14 ProcessJobSMTrans14 Stopping to Aborting The processing resource initiated a process abort action. (it received an ABORT command or initiated an internal abort)
E40 PJ 15 ProcessJobSMTrans15 Pause to Aborting The processing resource initiated a process abort action. (it received an ABORT command or initiated an internal abort)
E40 PJ 16 ProcessJobSMTrans16 Aborting to (no state) The processing resource abort procedure is complete and for some processing equipment the related Substrates are moved out as part of the error recovery.
E40 PJ 17 ProcessJobSMTrans17 Stopping to (no state) The processing resources stop procedure completed.
E40 PJ 18 ProcessJobSMTrans18 Queued/Pooled to (no state) “CANCEL,” “ABORT,” or “STOP” command received.

Reports#

Report 401#

This report is valid for the following events:

  • E40 PJ 1
  • E40 PJ 2
  • E40 PJ 3
  • E40 PJ 4
  • E40 PJ 5
  • E40 PJ 6
  • E40 PJ 7
  • E40 PJ 8
  • E40 PJ 9
  • E40 PJ 10
  • E40 PJ 11
  • E40 PJ 12
  • E40 PJ 13
  • E40 PJ 14
  • E40 PJ 15
  • E40 PJ 16
  • E40 PJ 17
  • E40 PJ 18

The report as the following structure:

Variable Name Template Variable Description Comment
ProcessJobId
ProcessJobbState

Substrate Tracking - E90#

Events#

State Model Transition Template Event Name Template Description Comment
E90 SO 1 SubstrateSMTrans01 (no state) to At Source The Substrate is registered
E90 SO 2 SubstrateSMTrans02 At Source to At Work The Substrate is taken from the source Substrate location and placed into the equipment.
E90 SO 3 SubstrateSMTrans03 At Work to At Source The Substrate has moved to the source Substrate location.
E90 SO 4 SubstrateSMTrans04 At Work to At Work The Substrate has moved out
from current equipment Substrate location towards a new equipment Substrate location
E90 SO 5 SubstrateSMTrans05 At Work to At Destination The Substrate is moved to the destination Substrate location
E90 SO 6 SubstrateSMTrans06 At Destination to At Work The Substrate is taken from the destination Substrate location and placed into the equipment.
E90 SO 7 SubstrateSMTrans07 At Destination to (Extinction) The Substrate is removed from the equipment by a normal transfer sequence
E90 SO 8 SubstrateSMTrans08 At Destination to At Source The user informs or the equipment detects that the Substrate is AT SOURCE
E90 SO 9 SubstrateSMTrans09 Any Substrate Substate to (Extinction) The equipment detects or is informed by the user that a Substrate has been removed.
E90 SO 10 SubstrateSMTrans10 (no state) to Needs Processing The Substrate object is created.
E90 SO 11 SubstrateSMTrans11 Needs Processing to In Process The processing to the Substrate starts.
E90 SO 12 SubstrateSMTrans12 In Process to Processing Complete The processing to the Substrate completes.
E90 SO 13 SubstrateSMTrans13 In Process to Needs Processing The Substrate is requested to be processed again.
E90 SO 14 SubstrateSMTrans14 Needs Processing to Processing Complete The Substrate has been removed from the equipment by an external agent or it is physically missing (LOST) or the Substrate has been not processed (SKIPPED).

Reports#

Report 501#

This report is valid for the following events:

  • E90 SO 1
  • E90 SO 2
  • E90 SO 3
  • E90 SO 4
  • E90 SO 5
  • E90 SO 6
  • E90 SO 7
  • E90 SO 8
  • E90 SO 9
  • E90 SO 10
  • E90 SO 11
  • E90 SO 12
  • E90 SO 13
  • E90 SO 14

The report as the following structure:

Variable Name Template Variable Description Comment
SubstrateLotID
SubstrateMtrlStatus
SubstrateID
SubstrateDestination
SubstrateHistory
SubstrateLocID
SubstrateProcState
SubstrateSource
SubstrateState
SubstrateType
SubstrateUsage