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Modeling Requirements#

Info

A pratical, User guide style approach to setting up the Resource model can be found here.

This template relies heavily on a very Product based approach to reduce the amount of customization needed.

To this regard, the template used the following Product MES Entities:

Material#

  • Parent Material:
    • Is expected to be the one that is Track In in order to start the Process;
    • Is not expected to be set to a Container;
    • Is expected to match to a Lot or equivalent;
  • Sub-Material:
    • Is expected to be tracked via Sub-Material Tracking if needed;
    • Is expected to be set to a Container;
    • Is expected to match to the Wafer or equivalent if under a Lot;
  • The template allows for nested Sub-Materials if needed (i.e. for Dies or Coupons)

Container#

  • Is expected to exist and have Sub-Materials set to its positions;
  • The positions and contents of the MES Container should, at any given time, match the positions on the Physical Container
    • This is critical for Slot Map verification, so the Slot Map matches between the MES system and the reality;
    • This is also critical to full automation remaining processes (i.e. Process/Control Job or Remote Commands) in order to be able to execute them correctly;
    • This is critical to Data Collection for Data Collection Parameters where the Sample Id is at Sub-Material Level (i.e. Material Name)
  • Container must be Docked to the Load Port Sub-Resource at Track In time
    • This is critical for full automation processes (i.e. Process/Control Job or Remote Commands) in order for the EI to be able to instruct the correct actions to the tool.
  • In the case where Track In is executed automatically, this is done so based on the Container Name, which will be read by the tool when the Container is physical received on the Load Port.

Resource#

  • The Automation Controller and Automation Drivers will be connected to these entities instance;
  • The ones that have Automation Controller and Drivers instances must have the needed configurations to establish connection;
  • The Automation Controller Instance must be connected to the Parent Resource;
  • The Sub-Resource must match the needed structure for the tool:
    • Load Port must be used for Load Ports;
    • Process must be used for tool parts (i.e. Process Chambers) where tracking Material is needed;
    • Components should be used for parts where we just want to track state or nothing at all;
    • Storage is supported for both Parent and Sub-Resource;

Recipe#

  • Used to store and maintain Recipes from the tool;
  • Critical for any equipment which needs Recipe Management;